laser produced plasma meaning in English
激光等离子体
Examples
- At the same time , the paper give out the investigation of x - ray interferometry in diagnostics of the electron density of laser produced plasma , and derived a modified term for wkbj solutions . at last , we proved these by numerical simulation
接着，本文给出了x射线激光干涉法在激光等离子体电子密度诊断中的理论研究，给出了对原有干涉法理论修正，并用数值计算中加以了验证。 - Extreme ultraviolet lithography is being developed as one of the most important candidates to fabricate a sub - o . lum - pattern . in recent years , several key technologies have been developed rapidly such as laser producing plasma source , extreme ultraviolet multilayer , optical fabrication and metrology , projection - camara alignment , low - defect mask and control technology of stage
极紫外投影光刻( extremeultravioletlithography简称euvl )最有可能成为下一世纪生产线宽小于0 . 1 m集成电路的技术，近年来在激光等离子体光源、极紫外多层膜、光学加工和检测、光学精密装调、低缺陷掩模、光刻胶技术以及高稳定工作台系统控制等关键技术方面得到了飞速发展。